| Item | Catalog Name | Product Specification | Application | |
|---|---|---|---|---|
| PAG | ionic | SP-401 | C17H17F3O4S2 |
Sensitivity at i-line Photoresist |
| FW: 406.44 | ||||
| CAS: | ||||
| White crystal | ||||
| mp: 166 – 167 ℃ | ||||
| SP-503 | C13H13F3O4S2 | |||
| FW: 354.37 | ||||
| CAS: | ||||
| White crystal | ||||
| mp: | ||||
| MS-2 | C33H22F17O3PS | |||
| FW: 852.54 | ||||
| CAS: | ||||
| White crystal | ||||
| mp: 159 - 163 ℃ | ||||
| Non-ionic | IM-NIT | C13H6F3NO5S | Sensitivity at i-line Photoresist |
|
| FW: 345.25 | ||||
| CAS: 85342-62-7 | ||||
| White crystal | ||||
| mp: 212 – 214 ℃ | ||||
| IM-NIN | C16H6F9NO5S | |||
| FW: 495.27 | ||||
| CAS: | ||||
| White crystal | ||||
| mp: 149 – 151 ℃ | ||||
| SP-NPS | C7H11NO5S | |||
| FW: 221.23 | ||||
| CAS: | ||||
| White crystal | ||||
| mp: 92 – 93 ℃ | ||||
| SP-803 | C17H24N2O4S | |||
| FW: 352.45 | ||||
| CAS: | ||||
| Yellow powder | ||||
| mp: 68 – 70 ℃ | ||||
| λmax: 323nm | ||||
| λmax: 223nm | ||||
| SP-806 | C16H18N2O3S2 | |||
| FW: 350.46 | ||||
| CAS: | ||||
| Yellow crystal | ||||
| mp: 93 – 95 ℃ | ||||
| λmax: 227nm | ||||
| λmax: 400nm | ||||
| Item | Catalog Name | Product Specification | Application |
|---|---|---|---|
| PAG | SP-101 | C19H15F3O3S2 | Sensitivity at KrF line Photoresist |
| FW: 412.45 | |||
| CAS: 66003-78-9 | |||
| White crystal | |||
| mp: 134 – 139 ℃ | |||
| SP-104 | C22H15F9O3S2 | ||
| FW: 562.47 | |||
| CAS: 144317-44-2 | |||
| White crystal | |||
| mp: 80 – 82 ℃ | |||
| SP-106 | C25H22O3S2 | ||
| FW: 434.57 | |||
| CAS: 13891-29-7 | |||
| White crystal | |||
| mp: 111 – 113 ℃ | |||
| SP-107 | C18H15F6PS | ||
| FW: 408.34 | |||
| CAS: 57835-99-1 | |||
| White crystal | |||
| mp: 204 - 210 ℃ | |||
| SP-164 | C23H17F9O3S2 | ||
| FW: 576.49 | |||
| CAS: 284474-28-8 | |||
| Viscous liquid | |||
| bp: | |||
| SP-174 | C23H17F9O4S2 | ||
| FW: 592.49 | |||
| CAS: | |||
| SP-175 | C26H15F15O3S2 | ||
| FW: 724.50 | |||
| CAS: | |||
| White powder | |||
| mp: 129 – 132 ℃ | |||
| SP-201 | C21H26F3IO3S | ||
| FW: 542.39 | |||
| CAS: 84563-54-2 | |||
| White crystal | |||
| mp: 165 – 170 ℃ | |||
| SP-204 | C24H26F9IO3S | ||
| FW: 692.42 | |||
| CAS: 194999-85-4 | |||
| White crystal | |||
| mp: 170 – 175 ℃ | |||
| SP-210 | C30H41IO4S | ||
| FW: 624.61 | |||
| CAS: | |||
| White crystal | |||
| mp: 250 – 252 ℃ | |||
| SP-220 | C12H10F6IP | ||
| FW: 426.08 | |||
| CAS: 58109-40-3 | |||
| White crystal | |||
| mp: 138 – 140 ℃ | |||
| SP-221 | C16H10F9IO3S | ||
| FW: 580.2 | |||
| CAS: 194999-82-1 | |||
| White powder | |||
| mp: 78 – 84 ℃ | |||
| λmax: 203nm | |||
| λmax: 231nm | |||
| SP-301 | C13H22N2O4S2 | ||
| FW: 334.45 | |||
| CAS: 138529-81-4 | |||
| Pale yellow crystal | |||
| mp: 130 – 131 ℃ | |||
| λmax: 215nm | |||
| SP-302 | C9H15N2O4S2 | ||
| FW: 282.38 | |||
| CAS: 138529-84-7 | |||
| Pale yellow crystal | |||
| mp: 120 – 122 ℃ | |||
| λmax: 217m | |||
| SP-313 | C15H14N2O6S2 | ||
| FW: 382.41 | |||
| CAS: 138529-84-7 | |||
| Pale yellow crystal | |||
| mp: 138 – 140 ℃ |
| Item | Catalog Name | Product Specification | Application |
|---|---|---|---|
| PAG | SP-111 | C14H13F3O3S2 | Sensitivity at ArF line Photoresist |
| FW: 350.38 | |||
| CAS: 105299-70-7 | |||
| White crystal | |||
| mp: 95 – 97 ℃ | |||
| SP-151 | C9H11IF3O3S2 | ||
| FW: 288.31 | |||
| CAS: 85980-21-8 | |||
| White crystal | |||
| mp: 105 – 107 ℃ | |||
| SP-406 | C19H23F3O4S2 | ||
| FW: 436.51 | |||
| CAS: | |||
| White crystal | |||
| mp: 122 – 125 ℃ | |||
| SP-407 | C22H23F9O4S2 | ||
| FW: 586.53 | |||
| CAS: | |||
| White crystal | |||
| mp: 132 – 134 ℃ | |||
| λmax: 235nm | |||
| λmax: 215nm | |||
| SP-504 | C13H13F3O5S2 | ||
| FW: 370.36 | |||
| CAS: | |||
| Off white powder | |||
| mp: 161 – 162 ℃ | |||
| SP-505 | C18H25NO5S2 | ||
| FW: 399.53 | |||
| CAS: | |||
| Off white powder | |||
| mp: |
| Item | Catalog Name | Product Specification | Application |
|---|---|---|---|
| PAG | SP-320 | C13H8F2N2O4S2 |
Sensitivity at F2 line Photoresist |
| FW: 358.34 | |||
| CAS: 389857-24-3 | |||
| Pale yellow crystal | |||
| mp: 145 – 147 ℃ | |||
| λmax: 206nm | |||
| λmax: 237nm |
| Item | Catalog Name | Product Specification | Application |
|---|---|---|---|
| Intermediate | SP-TPS-Cl | C18H15ClS | Intermediate for PAG |
| FW: 298.83 | |||
| CAS: 4270-70-6 | |||
| White crystal | |||
| mp: > 300 ℃ | |||
| SP-TPS-OH | C21H22O4S | ||
| FW: 370.46 | |||
| CAS: | |||
| White orange powder | |||
| mp: 195 – 196 ℃ | |||
| SP-105-C | C12H10ClI | ||
| FW: 316.57 | |||
| CAS: 1483-72-3 | |||
| Light yellow crystal | |||
| mp: 233 – 235 ℃ |
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